12-13 November 2021
Taras Shevchenko National University of Kyiv
Europe/Kiev timezone

Talbot imaging usage for surface step control

12 Nov 2021, 14:20
15m
Online (Taras Shevchenko National University of Kyiv)

Online

Taras Shevchenko National University of Kyiv

64/13, Volodymyrska Street, City of Kyiv, Ukraine, 01601

Speaker

Andrey Goloborodko

Description

The phenomenon of Talbot image formation on the stepped surface is described and demonstrated both theoretically and experimentally. It is well known that when a grating is illuminated by spatially and temporary coherent light beam, it will be self-imaged at a certain distance $Z_T$ along the direction of propagation:
\begin{eqnarray}
Z_T=2\frac{D^2}{\lambda},
\end{eqnarray}
where $D$ is a grating period, $\lambda$ is a wavelength. In the case of stepped surface reflexes on the border are formed by unequal number of grating periods and their position is changed. The analysis is done for the case of plane illumination, but theoretical basis for the spherical wavefront is given. Based on the additional calibration any wavefront shape could be used to estimate step height and intensity distribution, that have different lateral pit displacements. By measuring the self-image distortions, the information content of the step height is obtained within region from $\Delta z_{\mathrm{Min}}\approx 0.001 Z_T$ to $\Delta z_{\mathrm{Max}}\approx 0.15 Z_T$. The feasibility of the proposed approach was experimentally illustrated with gratings of different periods $D = 150$, $200$, $250$, $300$, $350$ and $500 \mu$m and fill factor of 50$\%$.

Topics Session C. Applied optics and engineering

Primary authors

Andrey Goloborodko Prof. Leonid Poperenko (Taras Shevchenko National University of Kyiv, Faculty of Physics, Chair of Optics)

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