Speaker
Volodymyr Perevertailo
Description
Results of technological microwave plasma generator simulation based on Comsol Multiphysics environment are presented. Argon is used as working gas, microwave power of 300…700W. The method of generation based on microwave discharge of 2.45 GHz is researched.
Primary author
Co-author
Mr
Anatoly Kuzmichev
(National Technical University of Ukraine "Igor Sikorsky Kyiv Polytechnic Institute", )